Peristaltic micropump fabricated by depositing parylene directly on liquid

Satoshi Komatsu, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ2007-2010
ページ数4
DOI
出版ステータスPublished - 2009 12 11
外部発表はい
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
継続期間: 2009 6 212009 6 25

出版物シリーズ

名前TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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