Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy

Uijin Jung*, Kenta Kuwana, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

*この研究の対応する著者

研究成果: Conference contribution

抄録

This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

本文言語English
ホスト出版物のタイトルMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
ページ588-591
ページ数4
DOI
出版ステータスPublished - 2010 6 1
外部発表はい
イベント23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
継続期間: 2010 1 242010 1 28

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
国/地域China
CityHong Kong
Period10/1/2410/1/28

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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