Photoluminescence characteristics of amorphous slicon nitride nanoball film prevented from oxidizing in air

Tomoki Funatsu*, Isamu Kato

*この研究の対応する著者

研究成果: Article査読

抄録

Hydrogenated amorphous silicon (a-Si : H) nanoball film emits photoluminescence only after being thermally oxidized, because the oxidized film is sufficiently transparent that excitation laser light can reach Si nanocrystal. We fabricated amorphous silicon nitride (a-SiNH) nanoball film by reacting N 2 plasma and SiH4 gas. Without being thermally oxidized, this film was highly transparent and exhibited photoluminescence. The source of this photoluminescence is presumed to be either the quantum size effect of Si nanocrystal or electronic transitions in siloxane (Si-O-Si), which is present at the interface between Si nanocrystal and SiO 2. By coating the a-SiNH nanoball film with SiN film, we fabricated a-SiNH nanoball film that was siloxane-free but that exhibited photoluminescence. Hence, we attribute the observed photoluminescence to the quantum size effect of Si nanocrystal.

本文言語English
ページ(範囲)24-27
ページ数4
ジャーナルJournal of the Vacuum Society of Japan
55
1
DOI
出版ステータスPublished - 2012

ASJC Scopus subject areas

  • 分光学
  • 材料科学(全般)
  • 器械工学
  • 表面および界面

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