Photoluminescence study of chloride VPE-grown GaN

Tetsuzo Ueda, Masaaki Yuri, Heon Lee, James S. Harris, Takaaki Baba

研究成果: Conference contribution

1 引用 (Scopus)


We have examined the effect of growth conditions on photoluminescence (PL) characteristics of chloride VPE-grown GaN films. Undoped GaN films are grown on sapphire by a newly developed chloride VPE system which utilizes GaCl 3 and NH 3 as source materials. We find that the spectra depend strongly on the growth temperatures and the corresponding surface morphology. Peaks from excitons and donor-acceptor pairs (D-A pair) recombination are observed for the films with terrace-like flat surfaces grown at between 950°C and 1000°C. A peak due to exciton bound to neutral donors is observed for a growth temperature of 975°C where the acceptor-related peaks are not seen. Decreasing the growth temperature below 950°C causes rough surfaces due to three-dimensional growth, whereas increasing the growth temperature above 1000°C causes cracks or partial pealing off of the film. The films with rough surfaces or crystal failures show broad emission from deep acceptor levels. As a result, residual acceptors are eliminated in the very narrow range of the growth temperature around 975°C. It is also noted that an increase of the V/III ratio during the growth makes the line width of the band-edge peak narrower. The PL results show that a growth temperature around 975°C and high V/III ratio are essential to obtain better crystal quality and reduced concentration of residual acceptors.

ホスト出版物のタイトルMaterials Research Society Symposium - Proceedings
編集者R.J. Shul, S.J. Pearton, F. Ren, C.S. Wu
出版者Materials Research Society
出版物ステータスPublished - 1996
イベントProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
継続期間: 1996 4 81996 4 12


OtherProceedings of the 1996 MRS Spring Meeting
San Francisco, CA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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    Ueda, T., Yuri, M., Lee, H., Harris, J. S., & Baba, T. (1996). Photoluminescence study of chloride VPE-grown GaN. : R. J. Shul, S. J. Pearton, F. Ren, & C. S. Wu (版), Materials Research Society Symposium - Proceedings (巻 421, pp. 189-194). Materials Research Society.