Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Yoichi Yoshida; Hiromi Shibata; Seiichi Tagawa; Masakazu Washio; Yoneho Tabata; Noriyuki Kouchi; Atsushi Ogata

doi:10.1117/12.953039

Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

Yoichi Yoshida, Hiromi Shibata, Seiichi Tagawa, Masakazu Washio, Yoneho Tabata, Noriyuki Kouchi, Atsushi Ogata

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.

本文言語	English
ページ（範囲）	274-281
ページ数	8
ジャーナル	Proceedings of SPIE - The International Society for Optical Engineering
巻	1086
DOI	https://doi.org/10.1117/12.953039
出版ステータス	Published - 1989 8月 22
外部発表	はい

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
コンピュータサイエンスの応用
応用数学
電子工学および電気工学

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Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists. / Yoshida, Yoichi; Shibata, Hiromi; Tagawa, Seiichi; Washio, Masakazu; Tabata, Yoneho; Kouchi, Noriyuki; Ogata, Atsushi.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1086, 22.08.1989, p. 274-281.

研究成果: Article › 査読

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Picosecond electron-beam and synchrotron radiation pulse radiolysis for studies on electron-beam and x-ray resists

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