Piezoelectrically operated actuators by quartz micromachining for optical application

Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

We report the new type of a monolithic quartz actuator which is fabricated by anisotropic etching and operated through piezoelectric effect at resonant frequency. The quartz actuators with large displacement have no been developed because quartz has small piezoelectric constants compared to other materials such as PZT. However, we proved that a smart mechanism enabled us to have a large displacement up to 200 microns with a millimeter size suspended actuator using the piezoelectricity of quartz. As examples, we fabricated bellows type actuators and optical choppers, and measured their mechanical characteristics. We also showed that the bellows type actuator could displace a small object statically by hitting it repeatedly. This woodpecker motion can be applied to move the small optical component such as a mirror and prism to switch the path of light.

本文言語English
ホスト出版物のタイトルIEEE Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ, United States
出版社Publ by IEEE
ページ133-138
ページ数6
ISBN(印刷版)0780309588
出版ステータスPublished - 1993
外部発表はい
イベントProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
継続期間: 1993 2 71993 2 10

Other

OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
CityFort Lauderdale, FL, USA
Period93/2/793/2/10

ASJC Scopus subject areas

  • 工学(全般)

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