Piezoelectrically operated actuators by quartz micromachining for optical application

Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

研究成果: Conference contribution

10 引用 (Scopus)

抜粋

We report the new type of a monolithic quartz actuator which is fabricated by anisotropic etching and operated through piezoelectric effect at resonant frequency. The quartz actuators with large displacement have no been developed because quartz has small piezoelectric constants compared to other materials such as PZT. However, we proved that a smart mechanism enabled us to have a large displacement up to 200 microns with a millimeter size suspended actuator using the piezoelectricity of quartz. As examples, we fabricated bellows type actuators and optical choppers, and measured their mechanical characteristics. We also showed that the bellows type actuator could displace a small object statically by hitting it repeatedly. This woodpecker motion can be applied to move the small optical component such as a mirror and prism to switch the path of light.

元の言語English
ホスト出版物のタイトルIEEE Micro Electro Mechanical Systems
出版場所Piscataway, NJ, United States
出版者Publ by IEEE
ページ133-138
ページ数6
ISBN(印刷物)0780309588
出版物ステータスPublished - 1993
外部発表Yes
イベントProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS - Fort Lauderdale, FL, USA
継続期間: 1993 2 71993 2 10

Other

OtherProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
Fort Lauderdale, FL, USA
期間93/2/793/2/10

ASJC Scopus subject areas

  • Engineering(all)

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  • これを引用

    Toshiyoshi, H., Fujita, H., Kawai, T., & Ueda, T. (1993). Piezoelectrically operated actuators by quartz micromachining for optical application. : IEEE Micro Electro Mechanical Systems (pp. 133-138). Publ by IEEE.