Piezoelectrically operated optical chopper by quartz micromachining

Hiroshi Toshiyoshi*, Hiroyuki Fujita, Toshitsugu Ueda

*この研究の対応する著者

    研究成果: Article査読

    26 被引用数 (Scopus)

    抄録

    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm × 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 μm thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10approx.50 μm wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 μm (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account. We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper. [123]

    本文言語English
    ページ(範囲)3-9
    ページ数7
    ジャーナルJournal of Microelectromechanical Systems
    4
    1
    DOI
    出版ステータスPublished - 1995 3

    ASJC Scopus subject areas

    • 電子工学および電気工学
    • 機械工学

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