Pinhole-free pyrex glass etching using HF-H 2SO 4 mixed acid and its applications for a PDMS microflow system

Takahiro Arakawa, Yukiko Sato, Taro Ueno, Takashi Funatsu, Shuichi Shoji

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

Useful Pyrex glass etching method using HF and H 2SO 4 mixed acid was studied. To realize the etching behaviors of constant etch rate, high masks durability, small under cut and pinhole free, optimum composition of HF-H 2SO 4 system was found out. Pinhole-free etching, constant etching rate of 0.5 μm/min and smooth surface of less than 4.6nm was obtained at 0.8vol% HF and 32vol% H 2SO 4. This system realized high durability of the etching mask of Si, Cr/Au and even photoresists. This method is useful not only to fabricate Pyrex glass microchannels but also to make PDMS molds. We fabricated a prototype of the pneumatic actuated microvalve system for the single molecular imaging under Total Internal Reflection Fluorescence Microscopy (TIRFM). The leakage free valve actions are confirmed and the switching time of Open-Close and Close-Open modes are 100msec and 120msec respectively.

元の言語English
ホスト出版物のタイトルTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
ページ1489-1492
ページ数4
DOI
出版物ステータスPublished - 2005 11 9
イベント13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
継続期間: 2005 6 52005 6 9

出版物シリーズ

名前Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
2

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Korea, Republic of
Seoul
期間05/6/505/6/9

    フィンガープリント

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Arakawa, T., Sato, Y., Ueno, T., Funatsu, T., & Shoji, S. (2005). Pinhole-free pyrex glass etching using HF-H 2SO 4 mixed acid and its applications for a PDMS microflow system. : TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1489-1492). [3E4.48] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; 巻数 2). https://doi.org/10.1109/SENSOR.2005.1497365