PLZT electro-optic modulators on Si substrates using aerosol deposition for on-chip optical interconnections

T. Shimizu, M. Nakada, H. Tsuda, J. Akedo, K. Nishi, K. Ohashi

研究成果: Conference article査読

4 被引用数 (Scopus)

抄録

We developed lanthanum modified lead zirconate titanate, (Pb,La)(Zr,Ti)03 (PLZT), electro-optic modulators on a Si substrate using aerosol deposition (AD) for on-chip optical interconnections. The modulator was designed as a 250x300 μm ring resonator with a 7 dB extinction ratio at 3 Vp-p. We observed the optical transmission of a PZT waveguide and the transmission loss was as small as 4 dB/mm.

本文言語English
論文番号4347718
ページ(範囲)210-212
ページ数3
ジャーナルIEEE International Conference on Group IV Photonics GFP
出版ステータスPublished - 2007 12 1
外部発表はい
イベント2007 4th International Conference on Group IV Photonics, GFP 2007 -
継続期間: 2007 9 192007 9 21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials

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