Point-Arc Remote Plasma Chemical Vapor Deposition for High-Quality Single-Crystal Diamond Selective Growth

Engineering & Materials Science

• Chemical vapor deposition 85%
• Single crystals 84%
• Diamonds 73%
• Plasmas 67%
• Antennas 35%
• Impurities 35%
• Thickness control 27%
• Diamond films 27%
• Raman scattering 26%
• Spectroscopy 20%
• Crystalline materials 19%
• Nucleation 19%
• Contamination 17%
• Masks 17%
• Electron microscopes 17%
• Ions 16%
• X rays 16%
• Microwaves 16%
• Scanning 14%
• Fabrication 13%
• Substrates 13%

Physics & Astronomy

• arcs 61%
• diamonds 58%
• vapor deposition 56%
• antennas 48%
• single crystals 45%
• diamond films 20%
• contaminants 18%
• mass spectroscopy 17%
• contamination 16%
• filaments 15%
• masks 15%
• electron microscopes 14%
• Raman spectra 14%
• nucleation 13%
• damage 13%
• microwaves 12%
• impurities 12%
• scanning 11%
• causes 11%
• fabrication 11%
• electronics 9%
• ions 8%
• x rays 8%
• performance 8%
• energy 5%

Chemical Compounds

• Plasma Chemical Vapour Deposition 100%
• Diamond 69%
• Single Crystalline Solid 52%
• Liquid Film 21%
• Hot Filament Vapor Deposition 20%
• Secondary Ion Mass Spectroscopy 15%
• Nucleation 12%
• Raman Spectrum 12%
• Microwave 11%
• X-Ray 8%
• Modification 8%
• Electron Particle 7%
• Energy 6%
• Application 4%