POINT ION SOURCES BASED ON FIELD IONIZATION.

Masanori Komuro*, Hiroshi Hiroshima, Hajime Shimizu, Masatoshi Ono, Shingo Ichimura, Hiroshi Murakami, Mieko Sato

*この研究の対応する著者

研究成果: Chapter

抄録

Point ion sources utilizing the ionization of atoms and molecules in high electric fields have been studied at several laboratories in the U. S. A. , European countries and Japan for a drastic improvement in the performance of apparatuses that use finely focused ion beams. It is the main objective of this report to investigate the present status of studies on the basic phenomena and applications of the field point ion sources. In Chapter 1, the technology for application of high-brightness ion sources is surveyed. Chapter 2 provides a scientific foundation for the gas-phase field ionization source. Chapter 3 discusses the present technology of ion optics for ion micro-beams of high brightness. Chapter 4 discussed improvements of gas-phase field ion sources. Refs.

本文言語English
ホスト出版物のタイトルDenshi Gijutsu Sogo Kenkyusho Chosa Hokoku/Circulars of the Electrotechnical Laboratory
209
出版ステータスPublished - 1984 1 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)

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