Polarity-inverted ScAlN film growth by ion beam irradiation and application to overtone acoustic wave (000-1)/(0001) film resonators

Masashi Suzuki, Takahiko Yanagitani, Hiroyuki Odagawa

研究成果: Article査読

28 被引用数 (Scopus)

抄録

Polarity inversion in wurtzite film is generally achieved by the epitaxial growth on a specific under-layer. We demonstrate polarity inversion of c-axis oriented ScAlN films by substrate ion beam irradiation without using buffer layer. Substrate ion beam irradiation was induced by either sputtering a small amount of oxide (as a negative ion source) onto the cathode or by applying a RF bias to the substrate. Polarity of the films was determined by a press test and nonlinear dielectric measurement. Second overtone thickness extensional mode acoustic resonance and suppression of fundamental mode resonance, indicating complete polarity inversion, were clearly observed in bilayer highly oriented (000-1)/(0001) ScAlN film.

本文言語English
論文番号172905
ジャーナルApplied Physics Letters
104
17
DOI
出版ステータスPublished - 2014 4月 28
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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