Polarization inverted (0001) / (000-1) ScAIN film resonators operating in second overtone mode

Masashi Suzuki, Takahiko Yanagitani, Hiroyuki Odagawa

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Polarization-inverted multilayered structure can excite high overtone mode resonance. Resonant frequency of high order mode resonator is higher than that of 1st mode resonator even though entire film thickness is same. The film thickness of high order mode resonator is thicker in same operating frequency. Therefore, high order mode resonator is expected to have high power handling capability. Polarization are controlled by bottom surface properties in epitaxial films, but polarization inverted multilayer structure can not be fabricated. We obtained polarization inversion in ScAlN film by Al target sputtering with small amount of Al2O3 ingot. Thickness extensional mode electromechanical coupling coefficient kt of the ScAlN film was estimated to be 0.21. Two layered polarization inverted ScAlN film resonator was prepared in this deposition process. Suppression of 1st mode resonance and excitation of 2nd overtone mode resonance were observed.

本文言語English
ホスト出版物のタイトル2012 IEEE International Ultrasonics Symposium, IUS 2012
DOI
出版ステータスPublished - 2012
外部発表はい
イベント2012 IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
継続期間: 2012 10 72012 10 10

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2012 IEEE International Ultrasonics Symposium, IUS 2012
国/地域Germany
CityDresden
Period12/10/712/10/10

ASJC Scopus subject areas

  • 音響学および超音波学

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