Polymer-MEMS and Its Applications

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Fabrication methods of polymer microstruetures for (µTAS, Lab-on-a-chip and BioMEMS developed so far are reviewed. Conventional plastic molds of hot embossing, injection molding and casting have been applied for fabrications of the microstructures with improvements of precise temperature control etc. New silicone like material, PDMS have been widely used in (µTAS. Some UV photolithography methods have also been developed to realize 3D microstructures. Surface micromachining technologies using polymer as the structure and positive photoresist as the sacrificial layer are another potential fabrication methods in µTAS.

本文言語English
ページ(範囲)349-353
ページ数5
ジャーナルieej transactions on sensors and micromachines
124
10
DOI
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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