Post-hydrophilic treatment free plastic biochip fabrication method using polyurea film

H. Shinohara*, Y. Takahashi, J. Mizuno, S. Shoji

*この研究の対応する著者

研究成果

1 被引用数 (Scopus)

抄録

A novel low temperature bonding method was developed by using polyurea film as intermediate layers. A microchip having microchannel which has highly hydrophilic surface was realized by the pretreatment of VUV (vacuum ultraviolet) light irradiation. The bonding temperature was low enough to use thermo plastic channel plates such as PMMA (poly-methyl methacrylate) with negligible deformation of the channel structure. The results of contact angle measurements indicate that the highly hydrophilic surface of the microchannel was kept after the bonding process. For actual micro biochip fabrication, the post-hydrophilic treatment after bonding process can be skipped.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ367-370
ページ数4
DOI
出版ステータスPublished - 2008
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
国/地域United States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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