Preliminary results of vacuum pressure measurement by Laser Ionization method

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

研究成果: Article

16 引用 (Scopus)

抜粋

The possibility of vacuum pressure measurement by ionizing gaseous atoms or molecules with laser radiation was studied. Xe ions were successfully detected after irradiation by a focused Xe-Cl excimer laser, indicating that non-resonant 4 photon ionization was realized with the present system. It was confirmed that Xe signal intensity, as measured by a quadrapole mass analyzer, changed in proportion to Xe gas pressure from 10-5Torr to 10-9Torr. Xe isotopes were also measured and the results correlated well with their natural abundance.

元の言語English
ページ(範囲)L573-L575
ジャーナルJapanese journal of applied physics
26
発行部数5A
DOI
出版物ステータスPublished - 1987 5
外部発表Yes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

フィンガープリント Preliminary results of vacuum pressure measurement by Laser Ionization method' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用