Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O 6 thin films was 4.1×10 S cm-1, with a carrier concentration of 1.3×1020 cm-3 and a Hall mobility of 1.9 cm2 V-1S -1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.
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