Preparation of oxide superconducting films in MBE using NO2 and O3 gases

T. Shimizu*, H. Nonaka, S. Hosokawa, S. Ichimura, K. Arai

*この研究の対応する著者

研究成果: Article査読

9 被引用数 (Scopus)

抄録

Thin films of YBa2Cu3O7-δ (YBCO) were prepared in MBE with two types of oxidizing gases. One is a NO2 supersonic molecular beam which is well collimated NO2 beam with a high flux density. The other is a high purity ozone gas with good controllability in flux density. Using RHEED during deposition we observed growth behaviors of YBCO with each oxidizing gas. The RHEED intensity oscillations under coevaporation conditions suggest unit by unit growth of YBCO. The overall RHEED oscillation with period of c-axis unit was observed during sequential deposition with O3.

本文言語English
ページ(範囲)2003-2004
ページ数2
ジャーナルPhysica C: Superconductivity and its applications
185-189
PART 3
DOI
出版ステータスPublished - 1991 12 1
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • エネルギー工学および電力技術
  • 電子工学および電気工学

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