Pressure Measurement in XHV Region Using Nonresonant Multiphoton Ionization by Picosecond Pulsed Laser

Kiyohide Kokubun, Shigeyuki Sekine, Shingo Ichimura, Akira Kurokawa, Hazime Shimizu

研究成果: Article査読

3 被引用数 (Scopus)

抄録

By means of nonresonant multiphoton ionization using a picosecond pulsed YAG laser, pressure measurement for H2, CO and CO2 gases was carried out in the XHV pressure range. It was experimentally verified that pressure measurement was possible in the range of 10-11 Pa, and this pressure measurement method had pressure sensitivity of the same order of magnitude for the three molecules.

本文言語English
ページ(範囲)711-713
ページ数3
ジャーナルShinku/Journal of the Vacuum Society of Japan
37
9
DOI
出版ステータスPublished - 1994
外部発表はい

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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