Pressure measurement method using laser ionization for xhv

K. Kokubun, S. Ichimura, H. Shimizu, S. Sekine

研究成果: Article

8 引用 (Scopus)

抜粋

A pressure measurement method for xhv using laser ionization has been developed. By means of nonresonant multiphonon ionization, the proportional relation between the amount of laser-generated ions and the gas pressure is experimentally verified in the range 1 × 10-3-2 × 10-8 Pa. Also, a nonresonant 4-photon ionization of the He atom, which has the highest ionization potential of all atoms and molecules, and saturations of ionization for Xe, Kr, O2 and especially for H2, which is a main residual molecule in uhv and xhv, are successfully observed. In addition, a high-sensitivity ion-detection system for the exact measurement of several atoms and molecules in xhv is prepared. Noise due to scattered laser light is discussed.

元の言語English
ページ(範囲)657-659
ページ数3
ジャーナルVacuum
44
発行部数5-7
DOI
出版物ステータスPublished - 1993 1 1
外部発表Yes

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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