TY - JOUR
T1 - Pressure measurement of 10-10 to 10-12 Pa by nonresonant multiphoton ionization
AU - Kokubun, K.
AU - Sekine, S.
AU - Ichimura, S.
AU - Kurokawa, A.
AU - Shimizu, H.
PY - 1996
Y1 - 1996
N2 - In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.
AB - In order to increase the ion-detection efficiency of the pressure measurement method using nonresonant multiphoton ionization, an ion-detection head was improved. Using this head, pressure measurements were carried out for H2 and Xe in the extreme high vacuum region. As a result, for H2, by optimizing an incident ion energy, the efficiency increased by a factor of about 2.5. For Xe, without optimizing the incident ion energy, it increased by a factor of about 1.5.
KW - Extreme high vacuum
KW - H
KW - Ion-detection efficiency
KW - Nonresonant multiphoton ionization
KW - Pressure measurement
KW - Xe
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U2 - 10.1016/0042-207x(96)00019-x
DO - 10.1016/0042-207x(96)00019-x
M3 - Article
AN - SCOPUS:0030172904
VL - 47
SP - 557
EP - 559
JO - Vacuum
JF - Vacuum
SN - 0042-207X
IS - 6-8
ER -