Pressure Measurement with Laser 1. Laser-ionization Characteristics of Various Kinds of Gases

Kiyohide Kokubun, Shingo Ichimura, Hazime Shimizu

研究成果: Article査読

2 被引用数 (Scopus)

抄録

For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF ex-cimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10-8 Torr (1.3 × 10-6 Pa). In the case of rare gases and O2 gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.

本文言語English
ページ(範囲)7-14
ページ数8
ジャーナルShinku/Journal of the Vacuum Society of Japan
33
1
DOI
出版ステータスPublished - 1990
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学

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