Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions

Shingo Ichimura, Kiyohide Kokubun, Hazime Shimizu

研究成果: Article査読

抄録

A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 10° Pa is projected.

本文言語English
ページ(範囲)15-20
ページ数6
ジャーナルShinku/Journal of the Vacuum Society of Japan
33
1
DOI
出版ステータスPublished - 1990
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 電子工学および電気工学

フィンガープリント

「Pressure Measurement with Laser 2. A New Ion Counting System for Laser Generated Ions」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル