Pressure-sensitive channel chip for visualization measurement of micro gas flows

Yu Matsuda*, Ryota Misaki, Hiroki Yamaguchi, Tomohide Niimi


研究成果: Article査読

23 被引用数 (Scopus)


We have developed a new pressure sensing tool named pressure-sensitive channel chip (PSCC) by combining the pressure-sensitive paint (PSP) technique with the poly(dimethylsiloxane) (PDMS) micro-molding technique. The PSP technique based on the oxygen quenching of luminescence is a potential diagnostic tool for pressure measurement of micro gas flows. However, the application of PSP to micro scale measurement is very difficult, because the thickness and the surface roughness of conventional PSPs cannot be neglected compared with the characteristic length of micro channels, and the spatial resolution is not enough for micro scale measurements due to the aggregations of luminophore. PSCC is fabricated with PDMS containing a pressure-sensitive luminophore; thus PSCC is a micro channel which itself works as a pressure "distribution" sensor. A micro convergingdiverging nozzle with the throat width of 120 lm was demonstrated. The pressure distribution on the nozzle surface was successfully obtained by PSCC without the shortcomings of conventional PSPs.

ジャーナルMicrofluidics and Nanofluidics
出版ステータスPublished - 2011 10月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 材料化学


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