Metal-cluster-complex ion beams were produced stably using a cluster ion source, which is compact enough to be installed in commonly used secondary ion mass spectrometry (SIMS) systems. As a metal cluster complex, triosmium dodecacarbonyl, Os3(CO)12, was utilized, which has a molecular weight of 906.7. Since precise temperature control is necessary to sublimate the metal cluster complex stably without thermal decomposition, the ion source was equipped with compact heat-removal devices in addition to an external heater. Experimental results showed that the crucible temperature of the metal cluster complex can be maintained at about 130°C in continuous operation, which is an appropriate temperature for sublimation without the problem of decomposition. The ion source produced steady-state beams of Os 3(CO)n+ (n = 7 or 8) ions with a beam current exceeding 10nA at 10keV. Beam current increased with gas pressure, depending on the temperature of the crucible holding the metal cluster complex. The rate of the change in beam current was within a few percent per hour; hence, in view of stability, the ion source was confirmed as usable in SIMS. Furthermore, beam profile was investigated using a Faraday cup with a knife-edge as well as a GaAs/AlAs multilayer substrate as a beam target.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2006 7月 7|
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