Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure

Shoji Kakio, Yoshiki Kato, Ryota Suenaga, Masashi Suzuki, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

研究成果査読

3 被引用数 (Scopus)

抄録

Recently, bonded structures such as LiTaO3/quartz structures have been attracting attention as a means of obtaining high-performance surface acoustic wave (SAW) devices. To investigate the possibility of evaluating the acoustical loss in such bonded structures by subtracting the calculated leakage loss into the water from the measured normalized attenuation factor, propagation properties such as the velocity and normalized attenuation factor of leaky SAWs on a water-loaded 36°YX-LiTaO3/AT0°X-quartz bonded structure were investigated using a line-focus-beam ultrasonic material characterization system and were found to be in good agreement with the calculated values for both the 0°X and 90°X propagation directions.

本文言語English
論文番号SKKC04
ジャーナルJapanese journal of applied physics
59
SK
DOI
出版ステータスPublished - 2020 7 1

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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