Prototype of micro ISFET for biomedical research

Shuichi Shoji, Masayoshi Esashi, Tadayuki Matsuo

研究成果: Article

抄録

With a view to developing an ion sensor capable of simple measurement of ion concentration at the cell level, a micro ionsensitive FET (micro ISFET) has been studied. For this purpose, it is necessary that the micro ISFET be a probe structure whose tip size is smaller than the cell and that the ion‐sensitive gate be placed at the tip of the probe. Special micro fabrication techniques are required for such a micro ISFET. This paper describes a three‐dimensional processing technique to fabricate a microprobe from an Si wafer and a method for forming an ISFET on a Si probe. Based on these fabrication techniques, a fundamental design of the micro ISFET is performed. An Si3N4 gate micro ISFET for pH is fabricated that has a tip size of 10 μm and a gate area of 5 × 5 μm2. Its characteristics are evaluated.

元の言語English
ページ(範囲)21-29
ページ数9
ジャーナルElectronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)
69
発行部数6
DOI
出版物ステータスPublished - 1986
外部発表Yes

Fingerprint

Field effect transistors
field effect transistors
prototypes
probes
Ion sensitive field effect transistors
Gates (transistor)
fabrication
Microfabrication
Ions
ion concentration
cells
wafers
Fabrication
sensors
Sensors
Processing
ions

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

これを引用

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