Prototype of the multi-pixel X-ray microcalorimeter

H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1108-1111
ページ数4
ISBN(電子版)0780377311, 9780780377318
DOI
出版ステータスPublished - 2003 1 1
イベント12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
継続期間: 2003 6 82003 6 12

出版物シリーズ

名前TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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