Proximity gettering of heavy metals by high energy ion implantation

T. Kuroi; Y. Kawasaki; S. Komori; K. Fukumoto; M. Inuishi; K. Tsukamoto; H. Shinyashiki; T. Shingyoji

doi:10.7567/ssdm.1992.pd2-5

Proximity gettering of heavy metals by high energy ion implantation

T. Kuroi, Y. Kawasaki, S. Komori, K. Fukumoto, M. Inuishi, K. Tsukamoto, H. Shinyashiki, T. Shingyoji

研究成果: Paper › 査読

2 被引用数 (Scopus)

抄録

We studied the proximity gettering of heavy metals by secondary defects, using high energy, high dose ion implantation by means of intentionally contaminating samples with copper and iron. It was demonstrated that the secondary defects induced by high energy boron or silicon implantation can act as a gettering site of heavy metals and reduce the junction leakage current. The proximity gettering by silicon implantation is more effective than that by boron implantation. Moreover it seems to be difficult to getter iron atoms in comparison with copper atoms.

本文言語	English
ページ	398-400
ページ数	3
DOI	https://doi.org/10.7567/ssdm.1992.pd2-5
出版ステータス	Published - 1992
外部発表	はい
イベント	Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials - SSDM '92 - Tsukuba, Jpn 継続期間: 1992 8 26 → 1992 8 28

Other

Other	Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials - SSDM '92
City	Tsukuba, Jpn
Period	92/8/26 → 92/8/28

ASJC Scopus subject areas

Engineering(all)

文献へのアクセス

10.7567/ssdm.1992.pd2-5

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引用スタイル

Kuroi, T., Kawasaki, Y., Komori, S., Fukumoto, K., Inuishi, M., Tsukamoto, K., Shinyashiki, H., & Shingyoji, T. (1992). Proximity gettering of heavy metals by high energy ion implantation. 398-400. Paper presented at Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials - SSDM '92, Tsukuba, Jpn, . https://doi.org/10.7567/ssdm.1992.pd2-5

Kuroi, T, Kawasaki, Y, Komori, S, Fukumoto, K, Inuishi, M, Tsukamoto, K, Shinyashiki, H & Shingyoji, T 1992, 'Proximity gettering of heavy metals by high energy ion implantation', Paper presented at Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials - SSDM '92, Tsukuba, Jpn, 92/8/26 - 92/8/28 pp. 398-400. https://doi.org/10.7567/ssdm.1992.pd2-5

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AU - Tsukamoto, K.

AU - Shinyashiki, H.

AU - Shingyoji, T.

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