抄録
Gallium nitride (GaN) was prepared by the pyrolytic conversion of both [Ga(NEt2)3]2 and its ammonolysis product at 600°C for 4 h under Ar. The pyrolyzed residues were analyzed by X-ray powder diffraction and scanning electron microscopy, and the pyrolysis processes of the precursors under He were investigated by thermogravimetry-mass spectrometry. The XRD pattern of the pyrolyzed residue of [Ga(NEt2)3]2 showed well-resolved peaks due to a mixture of cubic and hexagonal close-packed layers of GaN. The broad XRD pattern of the pyrolyzed residue of the ammonolysis product was also attributed to the mixture of cubic and hexagonal close-packed layers of GaN. For the pyrolysis of [Ga(NEt2)3]2, the evolution of hydrocarbons was extensively observed at relatively high temperature, but a large amount of carbon (11 mass%) was still detected in the pyrolyzed residue. On the other hand, the amount of carbon was only 1.1 mass% in the pyrolyzed residue of the ammonolysis product. The pyrolysis results of the ammonolysis product under Ar were very similar to those of [Ga(NEt2)3]2 under NH3.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 93-98 |
| ページ数 | 6 |
| ジャーナル | Materials Research Society Symposium - Proceedings |
| 巻 | 468 |
| 出版ステータス | Published - 1997 1 1 |
| イベント | Proceedings of the 1997 MRS Spring Symposium - San Francisco, CA, USA 継続期間: 1997 4 1 → 1997 4 4 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering