TY - JOUR
T1 - Pyrolytic preparation of gallium nitride from [Ga(NEt2)3]2 and its ammonolysis compound
AU - Koyama, S.
AU - Sugahara, Y.
AU - Kuroda, K.
PY - 1997/1/1
Y1 - 1997/1/1
N2 - Gallium nitride (GaN) was prepared by the pyrolytic conversion of both [Ga(NEt2)3]2 and its ammonolysis product at 600°C for 4 h under Ar. The pyrolyzed residues were analyzed by X-ray powder diffraction and scanning electron microscopy, and the pyrolysis processes of the precursors under He were investigated by thermogravimetry-mass spectrometry. The XRD pattern of the pyrolyzed residue of [Ga(NEt2)3]2 showed well-resolved peaks due to a mixture of cubic and hexagonal close-packed layers of GaN. The broad XRD pattern of the pyrolyzed residue of the ammonolysis product was also attributed to the mixture of cubic and hexagonal close-packed layers of GaN. For the pyrolysis of [Ga(NEt2)3]2, the evolution of hydrocarbons was extensively observed at relatively high temperature, but a large amount of carbon (11 mass%) was still detected in the pyrolyzed residue. On the other hand, the amount of carbon was only 1.1 mass% in the pyrolyzed residue of the ammonolysis product. The pyrolysis results of the ammonolysis product under Ar were very similar to those of [Ga(NEt2)3]2 under NH3.
AB - Gallium nitride (GaN) was prepared by the pyrolytic conversion of both [Ga(NEt2)3]2 and its ammonolysis product at 600°C for 4 h under Ar. The pyrolyzed residues were analyzed by X-ray powder diffraction and scanning electron microscopy, and the pyrolysis processes of the precursors under He were investigated by thermogravimetry-mass spectrometry. The XRD pattern of the pyrolyzed residue of [Ga(NEt2)3]2 showed well-resolved peaks due to a mixture of cubic and hexagonal close-packed layers of GaN. The broad XRD pattern of the pyrolyzed residue of the ammonolysis product was also attributed to the mixture of cubic and hexagonal close-packed layers of GaN. For the pyrolysis of [Ga(NEt2)3]2, the evolution of hydrocarbons was extensively observed at relatively high temperature, but a large amount of carbon (11 mass%) was still detected in the pyrolyzed residue. On the other hand, the amount of carbon was only 1.1 mass% in the pyrolyzed residue of the ammonolysis product. The pyrolysis results of the ammonolysis product under Ar were very similar to those of [Ga(NEt2)3]2 under NH3.
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M3 - Conference article
AN - SCOPUS:0030685540
VL - 468
SP - 93
EP - 98
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
SN - 0272-9172
T2 - Proceedings of the 1997 MRS Spring Symposium
Y2 - 1 April 1997 through 4 April 1997
ER -