Quantitative backscattered electron imaging of field emission scanning electron microscopy for discrimination of nano-scale elements with nm-order spatial resolution

Physics & Astronomy

• electron flux density 75%
• discrimination 75%
• field emission 70%
• spatial resolution 61%
• scanning electron microscopy 50%
• electrons 32%
• electron acceleration 32%
• electric potential 28%
• thin films 26%
• backscattering 23%
• brightness 22%
• electron microscopes 20%
• scanning 16%
• coefficients 14%
• silicon 14%

Engineering & Materials Science

• Field emission 100%
• Electrons 78%
• Scanning electron microscopy 61%
• Imaging techniques 59%
• Electron correlations 30%
• Thin films 29%
• Backscattering 21%
• Electric potential 16%
• Luminance 15%
• Electron microscopes 14%
• Silicon 12%
• Scanning 12%
• Substrates 11%

Medicine & Life Sciences

• Electron Scanning Microscopy 76%
• Electrons 62%
• Acceleration 22%
• Silicon 13%