抄録
The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.
本文言語 | English |
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ホスト出版物のタイトル | Unknown Host Publication Title |
Place of Publication | New York, NY, USA |
出版社 | IEEE |
ページ | 113-116 |
ページ数 | 4 |
出版ステータス | Published - 1985 |
外部発表 | はい |
ASJC Scopus subject areas
- 工学(全般)