QUARTZ CRYSTAL MICROMECHANICAL DEVICES.

Toshitsugu Ueda; Fusao Kohsaka; Daisuke Yamazaki; Toshio Iino

QUARTZ CRYSTAL MICROMECHANICAL DEVICES.

Toshitsugu Ueda, Fusao Kohsaka, Daisuke Yamazaki, Toshio Iino

研究成果: Conference contribution

抄録

The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.

本文言語	English
ホスト出版物のタイトル	Unknown Host Publication Title
Place of Publication	New York, NY, USA
出版社	IEEE
ページ	113-116
ページ数	4
出版ステータス	Published - 1985
外部発表	はい

ASJC Scopus subject areas

Engineering(all)

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引用スタイル

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title = "QUARTZ CRYSTAL MICROMECHANICAL DEVICES.",

abstract = "The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.",

author = "Toshitsugu Ueda and Fusao Kohsaka and Daisuke Yamazaki and Toshio Iino",

year = "1985",

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T1 - QUARTZ CRYSTAL MICROMECHANICAL DEVICES.

AU - Ueda, Toshitsugu

AU - Kohsaka, Fusao

AU - Yamazaki, Daisuke

AU - Iino, Toshio

PY - 1985

Y1 - 1985

N2 - The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.

AB - The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.

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M3 - Conference contribution

AN - SCOPUS:0022307844

SP - 113

EP - 116

BT - Unknown Host Publication Title

PB - IEEE

CY - New York, NY, USA

ER -