抄録
The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.
| 本文言語 | English |
|---|---|
| ホスト出版物のタイトル | Unknown Host Publication Title |
| Place of Publication | New York, NY, USA |
| 出版社 | IEEE |
| ページ | 113-116 |
| ページ数 | 4 |
| 出版ステータス | Published - 1985 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 工学（全般）