The authors are developing several kinds of micromechanical devices (MMD) made from quartz crystal using photolithography and anisotropic etching. A description is given of the mechanical and chemical properties of the quartz crystal used in MMDs, and the mirror galvanometer movement and pressure transducer which use such devices.
|ホスト出版物のタイトル||Unknown Host Publication Title|
|Place of Publication||New York, NY, USA|
|出版ステータス||Published - 1985|
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