RADIAL DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE TUBE.

Isamu Kato, Hisazumi Tsuchida, Masaru Nagai

    研究成果: Article

    11 被引用数 (Scopus)

    抄録

    A new microwave discharge method for obtaining a plasma suitable for a gas laser medium and plasma chemical vapor deposition is investigated. When the plasma frequency is higher than that of the microwave power supplied to the plasma in the coaxial line mode, the plasma plays an important role as the inner conductor of the coaxial line. Therefore cylindrical plasma of the arbitrary size which is uniform along the circumference and in the radial direction can be produced. The radial distribution of the excited atom densitY of the plasma is measured using the side-light method. It is found that the microwave discharge has the proper distribution. The distribution is not bell-shaped, but is either trapezoidal in shape or has a central dip.

    本文言語English
    ページ(範囲)5312-5315
    ページ数4
    ジャーナルJournal of Applied Physics
    51
    10
    DOI
    出版ステータスPublished - 1980 10

    ASJC Scopus subject areas

    • Physics and Astronomy(all)
    • Physics and Astronomy (miscellaneous)

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