Reduction of charging in surface analysis of insulating materials by AES

S. Ichimura, H. E. Bauer, H. Seiler, S. Hofmann

研究成果: Article査読

43 被引用数 (Scopus)

抄録

Practical methods are investigated to reduce the charging which is often observed during AES analysis of insulating samples with keV electrons. It is shown that the negative charge caused by electron beams with keV energy can be either avoided or considerably reduced by the use of an additional electron beam or by the supply of low‐energy (500 eV) positive ions. It is also reported and discussed that the state of reduced or vanishing charging obtained by both methods can be maintained for long periods of time.

本文言語English
ページ(範囲)250-256
ページ数7
ジャーナルSurface and Interface Analysis
14
5
DOI
出版ステータスPublished - 1989 5
外部発表はい

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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