TY - JOUR
T1 - Reduction of pinhole leakage current of srtio3 filins by arf excimer laser deposition with shadow mask (“eclipse method”)
AU - Iwabuchi, Mamoru
AU - Kinoshita, Kazuya
AU - Ishibashi, Hiroshige
AU - Kobayashi, Takeshi
PY - 1994/4
Y1 - 1994/4
N2 - An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.
AB - An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.
KW - Excimer laser
KW - Ferroelectric
KW - Leakage current
KW - Oxide superconductor
KW - Pinhole
KW - Shadow mask
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U2 - 10.1143/JJAP.33.L610
DO - 10.1143/JJAP.33.L610
M3 - Article
AN - SCOPUS:0028421717
VL - 33
SP - L610-L612
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4
ER -