Reduction of pinhole leakage current of srtio3 filins by arf excimer laser deposition with shadow mask (“eclipse method”)

Mamoru Iwabuchi, Kazuya Kinoshita, Hiroshige Ishibashi, Takeshi Kobayashi

研究成果: Article査読

34 被引用数 (Scopus)


An innovative technique using a shadow mask placed between the target and the substrate to reduce particles and/or droplets unique to excimer laser deposition was proposed. In the simple technique tentatively called the “eclipse method”, the deposition process proceeds with ablated species which are diffused with the assistance of the ambient gas. Even when we used pressed-powder targets, mirror like SrTiO3 films deposited by the method showed large improvement in the primitive but intrinsic problem of leakage current due to many pinholes. In addition, the dielectric properties were examined from the electrical point of view.

ジャーナルJapanese journal of applied physics
出版ステータスPublished - 1994 4

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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