Report of VAMAS-SCA-WG in Japan

Takuichi Ohmura, Akira Kurokawa, Ryuichi Shimizu, Teiichi Homma, Daisuke Fujita, Keisuke Goto, Masao Uemura, Heizo Tokutaka, Kazuhiro Yoshihara, Masayasu Kurahashi, Shingo Ichimura, Chuhei Oshima, Fusami Soeda, Yasuo Fukuda, Yoshihiro Hashiguchi, Kozo Tanaka, Masahiro Kudo, Takayoshi Hayashi, Akihiro Tanaka, Yoshiro ShiokawaTetsu Sekine

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Under the auspices of the 141 comittee (Microbeam Analysis) of Japan Society for Promotion of Science, the AES working group has commenced its work on 1) the establishment of the measurement conditions and 2) the comparison of standard spectra obtained by various spectrometers. Attention was particularly paid to taking the Auger signals at an optimum position of the specimen with respect to the energy analyzer. Systematic investigations on the procedures for energy analyzers, cylindrical mirror analyzers (CMA), are reported in the first section of the present paper. Three kinds of calibration procedures were proposed for attaining the optimum positioning of the specimen with respect to the CMA. Elastic peak varied sensitively in intensity and peak shape, around the optimum position of the specimen. The comparison of AES instruments installed at several institutes was carried out by measurement of the derivative Auger peak intensity ratio for pure gold and copper under a specific measurement condition, proposed in the first section. The results are shown by the Youden plot following the laborious work performed by the ASTM comittee E-42.

本文言語English
ページ(範囲)744-754
ページ数11
ジャーナルShinku/Journal of the Vacuum Society of Japan
31
8
DOI
出版ステータスPublished - 1988
外部発表はい

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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