RF-MEMS from DC to millimeter-wave

Tamotsu Nishino*, Moriyasu Miyazaki, Yukihisa Yoshida, Motohisa Taguchi

*この研究の対応する著者

研究成果: Conference contribution

抄録

We have developed a hollow cavity structure and two types of RF-MEMS switches. The one has less parasitic capacitance to be used in high frequency band with the hollow structure. The other has compact structure with a common bias electrode to a signal line. This type suits for the cellular phone frequencies. In this paper, we introduce both of the switches, and discuss on the future applications of the RF-MEMS.

本文言語English
ホスト出版物のタイトル2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006 - Circuits and Systems for Signal Processing, lnformation and Communication Technologies, and Power Sources and Systems
ページ297-300
ページ数4
出版ステータスPublished - 2006
外部発表はい
イベント2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006 - Benalmadena, Malaga, Spain
継続期間: 2006 5月 162006 5月 19

出版物シリーズ

名前Proceedings of the Mediterranean Electrotechnical Conference - MELECON
2006

Conference

Conference2006 IEEE Mediterranean Electrotechnical Conference, MELECON 2006
国/地域Spain
CityBenalmadena, Malaga
Period06/5/1606/5/19

ASJC Scopus subject areas

  • 電子工学および電気工学

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