Robust high-κ response in molecularly thin perovskite nanosheets

Minoru Osada, Kosho Akatsuka, Yasuo Ebina, Hiroshi Funakubo, Kanta Ono, Kazunori Takada, Takayoshi Sasaki

研究成果: Article査読

117 被引用数 (Scopus)

抄録

Size-induced suppression of permittivity in perovskite thin films is a fundamental problem that has remained unresolved for decades. This size-effect issue becomes increasingly important due to the integration of perovskite nanofilms into high-κ capacitors, as well as concerns that intrinsic size effects may limit their device performance. Here, we report a new approach to produce robust high-κ nanodielectrics using perovskite nanosheet (Ca 2Nb3O10), a new class of nanomaterials that is derived from layered compounds by exfoliation. By a solution-based bottom-up approach using perovskite nanosheets, we have successfully fabricated multilayer nanofilms directly on SrRuO3 or Pt substrates without any interfacial dead layers. These nanofilms exhibit high dielectric constant (>200), the largest value seen so far in perovskite films with a thickness down to 10 nm. Furthermore, the superior high-κ properties are a size-effect-free characteristic with low leakage current density (<10 -7 A cm-2). Our work provides a key for understanding the size effect and also represents a step toward a bottom-up paradigm for future high-κ devices.

本文言語English
ページ(範囲)5225-5232
ページ数8
ジャーナルACS Nano
4
9
DOI
出版ステータスPublished - 2010 9 28
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 材料科学(全般)
  • 物理学および天文学(全般)

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