ScAlN polarization inverted resonators and enhancement of kt2 in new YbAlN materials for BAW devices

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

AlN thin piezoelectric films are attractive for RF filter applications because of their low mechanical loss 1/Qm. We here introduce new AlN based materials: polarization inverted ScAlN multilayer and YbAlN films. Enhancement of electromechanical coupling coefficient in YbAlN were theoretically and experimentally demonstrated. These materials are promising for application in BAW and SAW devices.

本文言語English
ホスト出版物のタイトル2019 IEEE International Ultrasonics Symposium, IUS 2019
出版社IEEE Computer Society
ページ894-899
ページ数6
ISBN(電子版)9781728145969
DOI
出版ステータスPublished - 2019 10
イベント2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
継続期間: 2019 10 62019 10 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2019-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
国/地域United Kingdom
CityGlasgow
Period19/10/619/10/9

ASJC Scopus subject areas

  • 音響学および超音波学

フィンガープリント

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