Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

7 引用 (Scopus)

抜粋

This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

元の言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ770-773
ページ数4
DOI
出版物ステータスPublished - 2008 8 29
外部発表Yes
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷物)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
United States
Tucson, AZ
期間08/1/1308/1/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

フィンガープリント Scanning micromirror using deformation of a parylene-encapsulated liquid structure' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Yoshihata, Y., Binh-Khiem, N., Takei, A., Iwase, E., Matsumoto, K., & Shimoyama, I. (2008). Scanning micromirror using deformation of a parylene-encapsulated liquid structure. : MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 770-773). [4443770] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443770