Scanning micromirror using deformation of a parylene-encapsulated liquid structure

Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

研究成果: Conference contribution

7 被引用数 (Scopus)

抄録

This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

本文言語English
ホスト出版物のタイトルMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
ページ770-773
ページ数4
DOI
出版ステータスPublished - 2008 8 29
外部発表はい
イベント21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
継続期間: 2008 1 132008 1 17

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
国/地域United States
CityTucson, AZ
Period08/1/1308/1/17

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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