Secondary-ion-mass-spectrometry depth profiling of ultra-shallow boron delta layers in silicon with massive molecular ion beam of Ir 4(CO)7+

Yukio Fujiwara, Kouji Kondou, Kouji Watanabe, Hidehiko Nonaka, Naoaki Saito, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

研究成果: Article

7 引用 (Scopus)

抄録

Tetrairidium dodecacarbonyl, Ir4(CO)12, is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an Ir4(CO)7Y+ primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1 /e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10keV at an incident angle of 45°. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.

元の言語English
ページ(範囲)7599-7601
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
発行部数11
DOI
出版物ステータスPublished - 2007 11 6
外部発表Yes

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Depth profiling
Secondary ion mass spectrometry
molecular ions
Ion beams
secondary ion mass spectrometry
molecular beams
Boron
boron
ion beams
Silicon
Oxygen
silicon
oxygen
Partial pressure
energy
trailing edges
metal clusters
Molecular weight
partial pressure
molecular weight

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Secondary-ion-mass-spectrometry depth profiling of ultra-shallow boron delta layers in silicon with massive molecular ion beam of Ir 4(CO)7+. / Fujiwara, Yukio; Kondou, Kouji; Watanabe, Kouji; Nonaka, Hidehiko; Saito, Naoaki; Fujimoto, Toshiyuki; Kurokawa, Akira; Ichimura, Shingo; Tomita, Mitsuhiro.

:: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 46, 番号 11, 06.11.2007, p. 7599-7601.

研究成果: Article

Fujiwara, Yukio ; Kondou, Kouji ; Watanabe, Kouji ; Nonaka, Hidehiko ; Saito, Naoaki ; Fujimoto, Toshiyuki ; Kurokawa, Akira ; Ichimura, Shingo ; Tomita, Mitsuhiro. / Secondary-ion-mass-spectrometry depth profiling of ultra-shallow boron delta layers in silicon with massive molecular ion beam of Ir 4(CO)7+. :: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; 巻 46, 番号 11. pp. 7599-7601.
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abstract = "Tetrairidium dodecacarbonyl, Ir4(CO)12, is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an Ir4(CO)7Y+ primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1 /e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10keV at an incident angle of 45°. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.",
keywords = "Atomic mixing, Boron, Cluster, Decay length, Depth profiling, Depth resolution, Ion beam, Ir(CO), Silicon, SIMS",
author = "Yukio Fujiwara and Kouji Kondou and Kouji Watanabe and Hidehiko Nonaka and Naoaki Saito and Toshiyuki Fujimoto and Akira Kurokawa and Shingo Ichimura and Mitsuhiro Tomita",
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AU - Fujiwara, Yukio

AU - Kondou, Kouji

AU - Watanabe, Kouji

AU - Nonaka, Hidehiko

AU - Saito, Naoaki

AU - Fujimoto, Toshiyuki

AU - Kurokawa, Akira

AU - Ichimura, Shingo

AU - Tomita, Mitsuhiro

PY - 2007/11/6

Y1 - 2007/11/6

N2 - Tetrairidium dodecacarbonyl, Ir4(CO)12, is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an Ir4(CO)7Y+ primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1 /e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10keV at an incident angle of 45°. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.

AB - Tetrairidium dodecacarbonyl, Ir4(CO)12, is a massive compound called metal cluster complex, which has a molecular weight of 1104.9. Using an Ir4(CO)7Y+ primary ion beam, secondary ion mass spectrometry (SIMS) of boron-delta-doped silicon samples was performed. Depth resolution, defined by 1 /e decay length for the trailing edge of the boron delta layer, was investigated in the beam energy ranging from 2.5 to 10keV at an incident angle of 45°. Experimental results showed that the depth resolution improved with oxygen partial pressure at a beam energy of 5 keV. It was confirmed that the depth resolution without oxygen flooding monotonically improved as beam energy decreased. Furthermore, it was found that the favorable effect of oxygen flooding on depth resolution weakened as beam energy was reduced.

KW - Atomic mixing

KW - Boron

KW - Cluster

KW - Decay length

KW - Depth profiling

KW - Depth resolution

KW - Ion beam

KW - Ir(CO)

KW - Silicon

KW - SIMS

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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