Self-excited chopper made by quartz micromachining and its application to an optical sensor

Hiroshi Toshiyoshi, Hiroyuki Fujita, Toshitsugu Ueda

研究成果: Chapter

5 被引用数 (Scopus)

抄録

We report the successful self-excited operation of the monolithic optical chopper made of quartz. The chopper is oscillated through piezoelectric strain induced by electric field between meandering electrodes on the flexible suspensions. The piezoelectric signal from the deformed suspension is detected to control the amplitude of oscillation at constant magnitude. We also employed this chopper in an optical sensor as a mechanical component to regulate the incident laser-beam, and demonstrated chopper-amplification and demodulation.

本文言語English
ホスト出版物のタイトルProceedings of the IEEE Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ, United States
出版社Publ by IEEE
ページ325-330
ページ数6
ISBN(印刷版)078031834X
出版ステータスPublished - 1994
外部発表はい
イベントProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
継続期間: 1994 1 251994 1 28

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period94/1/2594/1/28

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Engineering(all)

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