Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates

T. W.H. Oates, A. Keller, S. Noda, S. Facsko

研究成果: Article査読

68 被引用数 (Scopus)

抄録

We demonstrate a production method for self-organized arrays of metal nanoparticles and aligned nanowires. Ion beam-sputtered Si/SiO2 substrates are used as templates for metallic vapor deposition, forming aligned arrays of 5-20 nm silver and cobalt nanoparticles with a period of 35 nm. The 20 nm diameter cobalt nanowires with lengths in excess of a micrometer are produced under appropriate conditions. All processing steps can be integrated into a single vacuum chamber and performed in a matter of minutes at mild temperatures. This inherently scalable technique can be extended to a range of substrate materials, array patterns, and nanoparticle materials.

本文言語English
論文番号063106
ジャーナルApplied Physics Letters
93
6
DOI
出版ステータスPublished - 2008
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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