Sensing system for quantitative analysis of metal particles using laser-induced breakdown spectroscopy

Satoshi Ikezawa*, Muneaki Wakamatsu, Toshitsugu Ueda

*この研究の対応する著者

    研究成果: Conference contribution

    1 被引用数 (Scopus)

    抄録

    This report describes a real-time sensing system for the detection and analysis of fine metal particles using laser-induced breakdown spectroscopy (LIBS). In conventional particle measurement methods, the scanning mobility particle sizer (SMPS) is widely used to obtain particle size distributions. However, when more details on particles are required, another chemical analysis must be performed separately from the one involving the SMPS. Hence, it is difficult to obtain the size and composition of fine particles in real time by conventional methods. By the proposed LIBS method, it is possible to obtain information on the density of fine particles as well as the chemical components of even ultrafine particles. Metal particles are focused on because the use of metal nanoparticles is expanding with emerging micro- and nanotechnologies. This work describes the use of the LIBS system as a fine metal particle monitoring system in a fabrication process using nanometal materials.

    本文言語English
    ホスト出版物のタイトルProceedings of IEEE Sensors
    ページ1596-1599
    ページ数4
    DOI
    出版ステータスPublished - 2011
    イベント10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick
    継続期間: 2011 10 282011 10 31

    Other

    Other10th IEEE SENSORS Conference 2011, SENSORS 2011
    CityLimerick
    Period11/10/2811/10/31

    ASJC Scopus subject areas

    • 電子工学および電気工学

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