Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

A. Suzuki*, H. Takahashi, E. Iwase, K. Matsumoto, I. Shimoyama

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
ページ1557-1560
ページ数4
DOI
出版ステータスPublished - 2009 12月 11
外部発表はい
イベントTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
継続期間: 2009 6月 212009 6月 25

出版物シリーズ

名前TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
国/地域United States
CityDenver, CO
Period09/6/2109/6/25

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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