Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification

Siim Heinsalu, Anna Kawano, Yuji Isogai, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

研究成果: Conference contribution

1 被引用数 (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds