Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field

Eiji Iwase, Shoji Takeuchi*, Isao Shimoyama

*この研究の対応する著者

研究成果: Paper査読

11 被引用数 (Scopus)

抄録

This paper describes three-dimensional (3-D) microstructure assembly using an external magnetic field. An external magnetic field perpendicular to a substrate lifts up a hinged structure due to the shape magnetic anisotropy. Micro flap structures (4.5 μm-thick electroplated Permalloy) having 0.2 μm-thick nickel elastic hinges with various lengths and widths are bent in out-of-plane direction in a magnetic field up to 50 kA/m. The volume of magnetic material and the stiffness of the hinges determine the sensitivity to a magnetic field. As a result, we realized sequential batch assembly using the difference of the sensitivity. By way of the example, we have erected plates 600 μm × 600 μm in size. Also, structures bent at 90 and 45 degrees out of the plane have been obtained at the same time.

本文言語English
ページ188-191
ページ数4
出版ステータスPublished - 2002 1 1
外部発表はい
イベント15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
継続期間: 2002 1 202002 1 24

Conference

Conference15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
国/地域United States
CityLas Vegas, NV
Period02/1/2002/1/24

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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