Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna

Sarina Kinoshita, Takahiko Yanagitani

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Energy harvesting from surrounding environment is required for battery-less sensors. RF-DC conversion with a rectifying antenna (so-called rectenna) is generally used to obtain energy from ambient electromagnetic wave. However, RF-DC conversion efficiency of the diode significantly decreases for ambient electromagnetic wave due to their weak RF power. In this study, we report a new type of bulk acoustic wave (BAW) piezoelectric transformer based on c-axis zig-zag multilayers ScAlN film in order to amplify the RF signal in the rectenna. c-Axis approximately 45°-tilted film exhibit high k'152 without undesired longitudinal wave excitation. The theoretical voltage gain was simulated by Mason's equivalent circuit model considering polarization inversions due to c-axis zig-zag structures. Voltage gain increase with k2Q value (= FOM) increasing or the number of layers n in the output layer increasing. S parameters of a BAW piezoelectric transformer with c-axis zig-zag 4 layers ScAlN film are measured by a network analyzer. As a result, voltage gain approaching + 20 dB with the 4 layers BAW piezoelectric transformer is obtained. This new type of polarization inverted FBAR transformer is attractive for a voltage transformer in the rectenna.

本文言語English
ホスト出版物のタイトル2019 IEEE International Ultrasonics Symposium, IUS 2019
出版社IEEE Computer Society
ページ1118-1119
ページ数2
ISBN(電子版)9781728145969
DOI
出版ステータスPublished - 2019 10月
イベント2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
継続期間: 2019 10月 62019 10月 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2019-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
国/地域United Kingdom
CityGlasgow
Period19/10/619/10/9

ASJC Scopus subject areas

  • 音響学および超音波学

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