Using a conventional RF magnetron sputtering system, we have successfully obtained the ZnO films in which crystallites c-axis unidirectionally aligned in the substrate plane without epitaxial technique. These are almost pure (112̄0) textured films. The alignment of crystallites c-axis in the plane was then carefully investigated by the X-ray pole figure analysis and AFM. We found that the crystallites of the film oriented randomly at the anode center and unidirectionally aligned at the fringe of the anode. Using the ZnO film, we have fabricated the ultrasonic transducer which consists of metal electrode /(112̄0) textured ZnO film/Al electrode film structures. The transducer clearly excited shear wave without any longitudinal waves. These results indicate the wide application of this film as shear-mode resonators and SH-type SAW devices on any substrates.
ASJC Scopus subject areas
- Acoustics and Ultrasonics