Sheet resistance underneath the Au ohmic-electrode on hydrogen-terminated surface-conductive diamond (001)

S. Kono*, T. Sasaki, M. Inaba, A. Hiraiwa, H. Kawarada

*この研究の対応する著者

研究成果: Article査読

6 被引用数 (Scopus)

抄録

The sheet resistance (Rsk) underneath ohmic Au-electrodes on hydrogen-terminated surface-conductive diamond (001) surfaces was examined by a special current-voltage measurement. It has been found that Rsk is about ~ 200 times larger than the sheet resistance, Rsh, in the open areas without Au-electrodes. The specific contact resistance, RC, of ohmic Au-electrodes on H-terminated surface-conductive diamonds as determined by linear transmission line models must be corrected accordingly. As the results of this, RC is suggested to be of the order of 1 × 10− 3 – 1 × 10− 4 Ωcm2.

本文言語English
ページ(範囲)93-98
ページ数6
ジャーナルDiamond and Related Materials
80
DOI
出版ステータスPublished - 2017 11月

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 化学 (全般)
  • 機械工学
  • 材料化学
  • 電子工学および電気工学

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